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10.1063/5.0092934
2023-03-10
Determining local modulus and strength of heterogeneous films by force–deflection mapping of microcantilevers
aip.org
© 2023 Author(s)
10.1063/5.0092934
https://doi.org/10.1063/5.0092934
VoR
doi:10.1063/5.0092934
Review of Scientific Instruments
application/pdf
AIP Publishing, LLC
Determining local modulus and strength of heterogeneous films by force–deflection mapping of microcantilevers
Kyle Larsen
Stefan Lehnardt
Bryce Anderson
Joseph Rowley
Richard Vanfleet
Robert Davis
Rev. Sci. Instrum. 2023.94:033904
2023-03-10
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10.1063/5.0092934
aip.org
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