Specifications for the tf20s

Electron Source

• Schottky Field emitter

• High maximum beam current (> 100 nA)

• High current in probe (0.5 nA or more in 1 nm probe)

• Small energy spread (0.7 eV or less)

• High stability and long life

 

• Patented S-TWIN objective lens (TWIN objective available)

• High tilt (40°) and large field of view (70° tilt for TWIN)

• Unsurpassed information limit (0.12 nm achievable)

• Coma-free alignment for high-resolution objective-lens centering

• Rotation-free magnification and diffraction series

• Magnification reproducible within 1.5 %

• Embedded CCD camera

• Plate camera with 56 sheets of film

 

• Bright Field and Annular Dark Field mode

• Ultra-high Resolution STEM HAADF detector

• Magnification range up to 10 000 kx

• Resolution of 0.2 nm (S-TWIN)

 

• Excellent EDX in-hole performance

• Low system background in EDX

• Small probes (< 0.3 nm)

• Embedded EDX, PEELS and Energy Filter

• Embedded EDX and EELS spectrum profiling and imaging

 

• Fully computer-controlled, eucentric side-entry, high-stability CompuStage

• Maximized tilts for any X, Y, Z, a, b combination

• Choice of a variety of specimen holders including low-background double-tilt holder

• X, Y movement 2 mm, specimen size 3 mm

• Specimen recall reproducibility <= 0.1 um (X, Y) and <= 0.1° (a tilt) attainable

• Drift < 0.5 nm/minute with a standard holder

 

• Fully interlocked, differentially pumped column.

• Oil-free vacuum system with turbo molecular pump, pre-pumping column, gun and specimen airlock

• Liner tubes pumped by additional Ion Getter Pump

• Ultra-high vacuum for contamination-free observation

• Vacuum levels: specimen chamber 2.7 x 10-5 Pa; gun 5 x 10-7 Pa

• Plate camera exchange with-out switching off High Tension and emitter

Point resolution (nm)                          0.24                                                               0.27

Line resolution (nm)                            0.10                                                               0.14

Information limit (nm)                          0.15                                                               0.18

        attainable                                      < 0.13                                                           < 0.17

Cs objective (mm)                               1.2                                                                 2.0

Cc objective (mm)                               1.2                                                                 2.0

Focal length (mm)                               1.7                                                                  2.7

Minimum focus step (nm)                   1.8                                                                  3.0

Maximum eucentric tilt                        ± 40º                                                             ± 70º

TEM magnification                              25x – 1030 kx                                             25x – 700 kx

SA diffraction camera length (mm)   40 – 4300                                                    55 – 6000

Maximum diffraction half angle          ± 12º                                                             ± 10º

STEM magnification                          100x – 10000 kx                                          100x – 10000 kx

HR STEM resolution (nm)                  0.20                                                                 0.34

 

Embedded EFTEM: 

 

LM (objective lens off )                     < 200x - >= 2000x

 

HM (objective lens on)                      2.5 kx - >= 2000 kx

 

Diffraction (mm)                                 < 200 - >= 5000