TF20specs

Specifications For the TF20 S-TWIN

Electron Source

  • Schottky Field emitter
  • High maximum beam current (> 100 nA)
  • High current in probe (0.5 nA or more in 1 nm probe)
  • Small energy spread (0.7 eV or less)
  • High stability and long life

Imaging

  • Patented S-TWIN objective lens (TWIN objective available)
  • High tilt (40°) and large field of view (70° tilt for TWIN)
  • Unsurpassed information limit (0.12 nm achievable)
  • Coma-free alignment for high-resolution objective-lens centering
  • Rotation-free magnification and diffraction series
  • Magnification reproducible within 1.5 %
  • Embedded CCD camera
  • Plate camera with 56 sheets of film

STEM

  • Bright Field and Annular Dark Field mode
  • Ultra-high Resolution STEM HAADF detector
  • Magnification range up to 10 000 kx
  • Resolution of 0.2 nm (S-TWIN)

Micro-analysis

  • Excellent EDX in-hole performance
  • Low system background in EDX
  • Small probes (< 0.3 nm)
  • Embedded EDX, PEELS and Energy Filter
  • Embedded EDX and EELS spectrum profiling and imaging

Specimen stage

  • Fully computer-controlled, eucentric side-entry, high-stability CompuStage
  • Maximized tilts for any X, Y, Z, a, b combination
  • Choice of a variety of specimen holders including low-background double-tilt holder
  • X, Y movement 2 mm, specimen size 3 mm
  • Specimen recall reproducibility <= 0.1 um (X, Y) and <= 0.1° (a tilt) attainable
  • Drift < 0.5 nm/minute with a standard holder

Vacuum

  • Fully interlocked, differentially pumped column.
  • Oil-free vacuum system with turbo molecular pump, pre-pumping column, gun and specimen airlock
  • Liner tubes pumped by additional Ion Getter Pump
  • Ultra-high vacuum for contamination-free observation
  • Vacuum levels: specimen chamber 2.7 x 10-5 Pa; gun 5 x 10-7 Pa
  • Plate camera exchange with-out switching off High Tension and emitter
    • Objective lens S-TWIN (standard) TWIN (high tilt) Point resolution (nm) 0.24 0.27 Line resolution (nm) 0.10 0.14 Information limit (nm) 0.15 0.18 attainable < 0.13 < 0.17 Cs objective (mm) 1.2 2.0 Cc objective (mm) 1.2 2.0 Focal length (mm) 1.7 2.7 Minimum focus step (nm) 1.8 3.0 Maximum eucentric tilt ± 40º ± 70º TEM magnification 25x – 1030 kx 25x – 700 kx SA diffraction camera length (mm) 40 – 4300 55 – 6000 Maximum diffraction half angle ± 12º ± 10º STEM magnification 100x – 10000 kx 100x – 10000 kx HR STEM resolution (nm) 0.20 0.34 Embedded EFTEM: LM (objective lens off ) < 200x - >= 2000x HM (objective lens on) 2.5 kx - >= 2000 kx Diffraction (mm) < 200 - >= 5000