Department Publications

2000s

2007

2. Extreme ultraviolet lithography: From research to manufacturing

   Bruno La Fontaine, Yunfei Deng, Ryoung-han Kim, Harry J. Levinson, Uzodinma Okoroanyanwu, Richard Sandberg, Tom Wallow, and Obert Wood

   J. Vac. Sci. Technol. B 25 (6), 2089-2093 (2007).
   
3. Lensless Diffractive Imaging Using Tabletop Coherent High-Harmonic Soft-X-Ray Beams

   Richard L. Sandberg, Ariel Paul, Daisy A. Raymondson, Steffen Hädrich, David M. Gaudiosi, Jim Holtsnider, … (8 other authors)

   Phys. Rev. Lett. 99 (9), 098103 (2007).
   

^‡Undergraduate Student Author

^†Graduate Student Author